www.gs68.de - Presentations: Process Sequences, Etching and more
Publications
- ASMC Munich 2001, Process Flow for combined Three Layer and Self Aligned
Contacts Gerhard Spitzlsperger, Torsten Liedtke, Masato Sadaoka und Masahiro
Shioya, (paper,
presentation).
- SPIE Edinburgh 2001, Recharacterization of a Tungsten etchback process
with special emphasis on PFC emission reduction anf throughput optimization
Gerhard Spitzlsperger. Andreas Rupp and Heike Lorenz,
(paper,
presentation).