Welcome to www.gs68.de

Within this site you can find mainly material related to CMOS based semiconductor manufacturing, especially plasma processing and ion implantation. Special semiconductor devices (at moment only the FETMOS) are also covered briefly.

An at moment small, but in future surely large section on this site is handling data analysis / integration in semiconductor manufacturing. Here are plenty of fields to be discussed, like the a bit outdated SPC (statistic process control) or APC (advanced process control) and FDC (fault detection and classification) as well as the various aspects of yield analysis (defects, manufacturing history ...).

For some of the topics covered on this site software utilities or demonstrations with (hopefully) some practical benefit are provided. They are mainly implemented in or . In this section you can find also, a bit of topic, the simple Perl application which were used to create this site.

Content:

• Data Analysis and Integration ... from Defect Analysis to FDC and back.
• Plasma Etching from simple physics to special applications.
• Publications of the webmaster related to semiconductor manufacturing
• Tutorials some introductory material.
• Software ... some useful utilities and programs.
• Library to calculate online simple formulas which are relevant in semiconductor manufacturing.

Pdf is extensively used throughout this site, you might want to download

The site is privately owned and maintained. There is no relation to my employer Hitachi Semiconductor (Europe) GmbH, or from first of April 2003 RENESAS Semiconductor Europe (Landshut) GmbH.

Disclaimer: