A brief Userguide to SIMPIMPLANT

SIMPLANT has a simple GUI and should be rather intuitive to use. Fig.  shows the necessary inputs to add a new implant, the meaning of dose, energy and species might be clear (hopefully) after the explanations given so far. Tilt is another parameter, where the beam is not perpendicular to the surface to achieve specific 3d structures. As we are only interested in one-dimensional profiles, for tilted implants only the vertical and not the lateral component is considered.

Figure: dialog for adding an implant

Figure: overlaid implants